Selective removal technology using chemical etching and excimer assistance in precision recycle of color filter

Pai-shan PA

Transactions of Nonferrous Metals Society of China ›› 2011, Vol. 21 ›› Issue (Special 1) : 210-214.

The Nonferrous Metals Society of China
Transactions of Nonferrous Metals Society of China ›› 2011, Vol. 21 ›› Issue (Special 1) : 210-214.
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Selective removal technology using chemical etching and excimer assistance in precision recycle of color filter

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2011, 21(Special 1): 210-214

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